Experiment characterization of the improvement of the rotational stiffness of the double-folded springs for MEMS structures

MEMS용 double-folded 스프링의 회전강성 개선 및 실험 평가

Compared to the simple-beam springs, double-folded springs have advantages of the linearity even at the long stroke, so that they have been widely used for optical components such as optical switches and optical attenuators. Until now only the stiffness of the double-folded springs dn the perpendicular direction of the shuttle movement has been considered for the stable operation, however, the rotational stiffness of the splings has not been researched as much. Therefore, this paper suggests the double-folded springs of the maximum rotational stiffness with the constant stiffness in the stroke direction using the reliability based topology optimization (RBTO), whose operation properties were experimentally characterized.