A study on the development of ultra-precision grinding system and manufacturing properties for aspheric surface micro lens

비구면 마이크로 렌즈 가공을 위한 초정밀 연삭 시스템 개발 및 가공 특성에 관한 연구

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra-precision aspheric surface lens increases higher. To enhance the precision and productivity of ultra precision aspheric surface micro lens, The development of ultra-precision grinding system and manufacturing properties for the aspheric surface micro lens are described. In the work reported in this paper, and ultra-precision grinding system for manufacturing the aspheric surface micro lens was developed by considering the factors affecting the surface roughness and profiles accuracy. And this paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. It results was that a form accuracy of $3\;{\mu}m$ P-V and a surface roughness of $0.1\;{\mu}m\;R_{max}$.