Abstract
An aspheric mirror, which requires less than $\lambda/2\;(\lambda=632.8nm)$ of form error for the $\phi$ 200mm reference curved surface, has been manufactured with an ultra-precision turning machine. We have known through several tests that the deformation patterns of the reflecting surface is related with bolting positions. In this paper the effect of main factors on deformation of a reflector is studied with a FE code. The considered factors are angular velocity, natural frequencies for a mirror, temperature increment during machining. The obtained test results are similar to the deformation shape due to the assumed temperature increment.
