A Study on Dynamic Analysis of the Electrostatic Actuator

정전력 구동기의 동특성 해석

A numerical simulation method is developed to analyze the dynamic response of a cantilever switch, which is driven by electrostatic force and a basic component of electro-mechanical coupled system. First, point-charges model on conductor is proposed as a lumped parameter of electrical part. Then, this model is easily incorporated into a multi-body dynamics analysis algorithm, the generalized recursive dynamics formula previously developed by our research group. The resulting motion of a coupled overall system is formulated as a differential algebraic equation form including electrical and mechanical variables together. The equation is simultaneously solved in every time step. To implement this approach into the useful dynamics analysis tool, we used multibody dynamics software (RecurDyn) based on the generalized recursive formula using relative coordinate. The developed numerical simulation tool is evaluated by applying to many different driving condition and switch configuration. The final analysis model will be added to RecurDyn as a basic module for dynamics analysis of electro-mechanical coupled system.