Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.1083-1086
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- 2005
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- 2005-8446(pISSN)
Light Scattering Characteristics of Defects on Silicon Wafer Surface
실리콘 웨이퍼 미세 표면결함의 광산란 특성 평가
- Ha T.H. (KIMM) ;
- Song J.Y. (KIMM) ;
- Miyoshi Takashi (Mechanical Eng. Dept., Osaka Univ.) ;
- Takaya Yasuhiro (Mechanical Eng. Dept., Osaka Univ.)
- Published : 2005.06.01
Abstract
Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses