Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
- /
- Pages.1186-1189
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- 2005
- /
- 2005-8446(pISSN)
A New Approach to Reduce Geometric Error in FIB Fabrication of Micro Structures
집속이온빔을 이용한 미세구조물 가공의 형상정밀도 향상
- Kim K.S. (School of Mechanical Engineering, Yonsei University) ;
- Jung J.W. (School of Mechanical Engineering, Yonsei University) ;
-
Min B.K.
(School of Mechanical Engineering, Yonsei University)
;
-
Lee S.J.
(School of Mechanical Engineering, Yonsei University)
;
- Park C.W. (Department of Mechanical Engineering, Korea Polytechnic University) ;
-
Lee J.H.
(Department of Mechanical Engineering, Korea Polytechnic University)
- 김경석 (연세대학교 기계공학부) ;
- 정재원 (연세대학교 기계공학부) ;
-
민병권
(연세대학교 기계공학부)
;
-
이상조
(연세대학교 기계공학부)
;
- 박철우 (한국산업기술대학교 기계공학과) ;
-
이종항
(한국산업기술대학교 기계공학과)
- Published : 2005.06.01
Abstract
Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.