Evaluation of Polishing Characteristics for Polishing Patterns

연마패턴에 따른 연마특성 평가

Polishing is cutting process that polished workpiece by relative motion of abrasive grain between polishing tool and workpiece. According to relative motion forms(polishing patterns) of abrasive grain, the surface quality is different. Then, polishing patterns are important essential in polishing process. In work field, polishing patterns are determined by an expert of experience. Therefore, to work effective polishing, it is necessary that evaluate polishing characteristics for polishing patterns. And, polishing machine is made with cartesian coordinate robots, we estimate polishing characteristics by measurement of surface roughness.