Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.1871-1874
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- 2005
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- 2005-8446(pISSN)
Development of 2-Axes Linear Motion System with Nano resolution for UHV
초진공용 2축 대변위 나노 스테이지 개발
Abstract
The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few
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