Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Effects of Thermal Treatments on Resonance Characteristics of FBAR Devices

  • Mai, Linh (School of Engineering, Information and Communications University) ;
  • Song, Hae-Il (School of Engineering, Information and Communications University) ;
  • Tuan, Le Minh (School of Engineering, Information and Communications University) ;
  • Su, Pham Van (School of Engineering, Information and Communications University) ;
  • Yoon, Gi-Wan (School of Engineering, Information and Communications University)
  • Published : 2005.05.27
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Abstract

The paper presents some methods to improve characteristics of film bulk acoustic resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done by sintering and/or annealing processes. The measurement showed a considerable improvement of return loss (S$_{11}$) and quality factor (Q$_{s/p}$). These thermal techniques seem very promising for enhancing FBAR resonance performance.

Keywords