한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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- Pages.272-275
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- 2005
Low voltage stability of a-Si:H TFTs with $SiN_x$ dielectric films prepared by PECVD using Taguchi methods
- Wu, Chuan-Yi (Central Research Institute, Chunghwa Picture Tubes, Ltd.) ;
- Sun, Kuo-Sheng (Central Research Institute, Chunghwa Picture Tubes, Ltd.) ;
- Cho, Shih-Chieh (Central Research Institute, Chunghwa Picture Tubes, Ltd.) ;
- Lin, Hong-Ming (Department of Materials Engineering, Tatung University)
- 발행 : 2005.07.19
초록
The high stability of a-Si:H TFTs device is studied with different deposited conditions of
키워드