한국정보디스플레이학회:학술대회논문집

한국정보디스플레이학회 (The Korean Infomation Display Society)
권호 표지

Investigation into the stability of ion beam treated inorganic alignment layer

  • Kim, Kyung-Chan (Department of Metallurgical Engineering, Yonsei University) ;
  • Ahn, Han-Jin (Department of Metallurgical Engineering, Yonsei University) ;
  • Kim, Jong-Bok (Department of Metallurgical Engineering, Yonsei University) ;
  • Hwang, Byung-Har (Department of Metallurgical Engineering, Yonsei University) ;
  • Baik, Hong-Koo (Department of Metallurgical Engineering, Yonsei University)
  • 발행 : 2005.07.19
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초록

Inorganic alignment layer (IAL) was deposited on an indium-tin-oxide (ITO) by using reactive sputtering deposition method. After deposited, IAL was irradiated by $Ar^+$ ion beam (IB) for liquid crystal (LC) alignment. IAL treated by various conditions such as IB energy, IB incident angle, and IB irradiation time had excellent alignment property and electro-optical property the same as that of PI. We investigated into the stability of ion beam treated IAL after a lapse of long time. However IAL irradiated IB did not occur degradation of electro-optical property. The results implied that IAL irradiated IB was adopted as LC alignment layer instead of rubbed polyimide.

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