한국정보디스플레이학회:학술대회논문집
- 2005.07a
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- Pages.676-678
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- 2005
Manufacturing Mobile Displays & Systems on Glass (
- Nobari, Ali Reza (Holtronic Technologies) ;
- Mourgue, Stephane (Holtronic Technologies) ;
- Clube, Francis (Holtronic Technologies) ;
- Jorda, Mathieu (Holtronic Technologies) ;
- Iriguchi, Chiharu (Technology Platform Research Center) ;
- Inoue, Satoshi (Technology Platform Research Center) ;
- Grass, Elmar (Microfab AG, Schaanwald) ;
- Mayer, Herbert (Microfab AG, Schaanwald)
- Published : 2005.07.19
Abstract
Future Mobile displays and the emerging systems on Glass for the upcoming TFT_LCDs or Active-OLEDs based on LTPS, and the exciting c-Si critically require very-high resolution lithography. We report the methodology and latest results on the alignment, magnification control and stitching systems on a HMA500 holographic mask aligner for printing
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