한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
- /
- Pages.808-810
- /
- 2005
A Roll-to-Roll Process for Manufacturing Flexible Active-Matrix Backplanes Using Self-Aligned Imprint Lithography and Plasma Processing
- Taussig, Carl (Hewlett Packard Laboratories) ;
- Jeffrey, Frank (Iowa Thin Film Technologies)
- 발행 : 2005.07.19
초록
Inexpensive large area arrays of thin film transistors (TFTs) on flexible substrates will enable many new display products that cannot be cost effectively manufactured by conventional means. This paper presents a new approach for low cost manufacturing of electronic devices using roll-to-roll (R2R) processes exclusively. It was developed in partnership by Hewlett Packard Laboratories and Iowa Thin Film Technologies (ITFT), a solar cell manufacturer. The approach combines ITFT's unique processes for vacuum deposition and etching of semiconductors, dielectrics and metals on continuous plastic webs with a method HP has invented for the patterning and aligning the multiple layers of a TFT with sub-micron accuracy and feature size.
키워드