Electro-optical characteristics of MgO protective layer after RF plasma treatment using Ar, $O_2$ and $H_2$ gases

  • Son, Chang-Gil (Charged particle beam and plasma laboratory/PDP Research Center, Department of Electrophysics Kwangwoon University) ;
  • Lee, H.J. (Department of Electrophysics Kwangwoon University) ;
  • Jung, J.C. (Charged particle beam and plasma laboratory / PDP Research Center, Surface Science Laboratory) ;
  • Park, W.B. (Department of Electrophysics Kwangwoon University) ;
  • Moon, M.W. (Department of Electrophysics Kwangwoon University) ;
  • Oh, P.Y. (Department of Electrophysics Kwangwoon University) ;
  • Jeong, J.M. (Department of Electrophysics Kwangwoon University) ;
  • Ko, B.D. (Department of Electrophysics Kwangwoon University) ;
  • Lee, J.H. (Department of Electrophysics Kwangwoon University) ;
  • Lim, J.E. (Department of Electrophysics Kwangwoon University) ;
  • Han, Y.G. (Department of Electrophysics Kwangwoon University) ;
  • Lee, S.B. (Department of Electrophysics Kwangwoon University) ;
  • Yoo, N.L. (Department of Electrophysics Kwangwoon University) ;
  • Jeong, S.H. (Department of Electrophysics Kwangwoon University) ;
  • Choi, E.H. (Department of Electrophysics Kwangwoon University)
  • Published : 2005.07.19

Abstract

One of the important problems in recent AC-PDP technology is high efficiency. In this research, we have been investigated electro-optical characteristics of MgO protective layer after radio frequency(RF) plasma treatment using Ar, $O_2$, and $H_2$ gases. The breakdown voltage order was $O_2$ > Ar > Nontreatment > $H_2$. Also, brightness order was $O_2$ > Ar > Non-treatment > $H_2$. In this experiment, the best result was obtained after $O_2-plasma$ treatment.

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