한국정보디스플레이학회:학술대회논문집
- 2005.07b
- /
- Pages.1526-1529
- /
- 2005
The effect of the working pressure on electro-optical properties of aluminium-doped zinc oxide thin film
- Bang, Bo-Rae (Division of Materials Science and Engineering, Hanyang University) ;
- Koo, Hong-Mo (Division of Materials Science and Engineering, Hanyang University) ;
- Moon, Yeon-Keon (Division of Materials Science and Engineering, Hanyang University) ;
- Kim, Se-Hyun (Division of Materials Science and Engineering, Hanyang University) ;
-
Park, Jong-Wan
(Division of Materials Science and Engineering, Hanyang University)
- Published : 2005.07.19
Abstract
Zinc oxide films have been actively investigated as transparent electrode materials for display. We report the effect of the working pressures on electro-optical properties of Al-doped ZnO thin films deposited by d.c. magnetron sputtering. The resistivity of the ZnO thin films was depended on atomic bombardment effect by working pressure.
Keywords