한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Characteristics of the indium tin oxide film grown on PES and PET substrates by a low-frequency magnetron sputtering method

  • Jung, Sang-Kooun (Department of Physics, Kyungpook National University) ;
  • Lee, Sung-Ho (Gumi Institute of Electronics Technology) ;
  • Kim, Myung-Chan (Department of Physics, Kyungpook National University) ;
  • Lee, Do-Kyung (Gumi Institute of Electronics Technology) ;
  • Cho, Yong (Department of Physics, Kyungpook National University) ;
  • Park, Duck-Kyu (Department of Physics, Kyungpook National University) ;
  • Sohn, Sang-Ho (Department of Physics, Kyungpook National University)
  • Published : 2005.07.19
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Abstract

In this study, we introduce indium tin oxide (ITO) thin films grown by using a low-frequency magnetron sputtering method (LFMSM). Characteristics of the ITO thin films deposited on polyethersulfone (PES) and polyethylene terephthalate (PET) substrates are investigated. Experiments were carried out as a function of deposition time. ITO thin films on polymer substrates revealed amorphous structure. The optical, the electrical and structural properties of the films on PES substrate are better than those on PET substrates.

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