Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
- /
- Pages.145-146
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- 2005
Dependence of Substrate Type on the Properties of CdS Films deposited by r.f. magnetron sputtering
기판 종류에 따른 스퍼터 증착된 CdS 박막의 구조적, 광학적 특성
-
Lee, Jae-Hyeong
(Kunsan National Univ.)
;
- Choi, Sung-Hun (Kunsan National Univ.) ;
-
Jung, Hak-Kee
(Kunsan National Univ.)
;
-
Lee, Jong-In
(Kunsan National Univ.)
;
-
Lim, Dong-Gun
(Chungju National Univ.)
;
- Yang, Kea-Joon (Chungju National Univ.)
- Published : 2005.07.07
Abstract
Cadmium sulphide (CdS) films have been prepared on polycarbonate (PC), polyethylene terephthalate (PET), and Coming 7059 substrates by r.f. magnetron sputtering technique at room temperature. A comparison of the properties of the films deposited on polymer and glass substrates was performed. In addition, the effect of the sputter pressure on the structural and optical properties of these films was evaluated.
Keywords