Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Realization of gas sensor using LTCC(Low Temperature Cofired Ceramic) technology

LTCC 기술을 이용한 가스센서 구현

  • Jeon, J.I. (Electronic Material Research Center, ADMT Co., Ltd.) ;
  • Choi, H.J. (Electronic Material Research Center, ADMT Co., Ltd.) ;
  • Lee, Y.B. (Electronic Material Research Center, ADMT Co., Ltd.) ;
  • Kim, K.S. (Electronic Material Research Center, ADMT Co., Ltd.) ;
  • Park, J.H. (Electronic Material Research Center, ADMT Co., Ltd.) ;
  • Kim, M.Y. (Electronic Material Research Center, ADMT Co., Ltd.) ;
  • Im, C.I. (Electronic Material Research Center, ADMT Co., Ltd.) ;
  • Mun, J.D. (Electronic Material Research Center, ADMT Co., Ltd.)
  • 전종인 (에이디엠티 부설 전자재료 연구소) ;
  • 최혜정 (에이디엠티 부설 전자재료 연구소) ;
  • 이영범 (에이디엠티 부설 전자재료 연구소) ;
  • 김광성 (에이디엠티 부설 전자재료 연구소) ;
  • 박정현 (에이디엠티 부설 전자재료 연구소) ;
  • 김무영 (에이디엠티 부설 전자재료 연구소) ;
  • 임채임 (에이디엠티 부설 전자재료 연구소) ;
  • 문제도 (에이디엠티 부설 전자재료 연구소)
  • Published : 2005.07.07
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Abstract

LTCC (Low Temperature Cofired Ceramic) technology is one of technologies which can realize SIP (System-In-a-Package). In this paper realization of gas sensor using LTCC technology was described. In the conventional gas sensor structure, wire bonding method is generally used as an interconnection method whereas in the LTCC sensor structure, via was used for the interconnection. As sensing materials, $SnO_2$ was adopted. The effect of frit glass portion on the adhesion of the sensing material to the LTCC substrate and the electrical conductivity of the sensing material were analyzed. AgPd, PdO, Pt was added to the sensing material as an additive for improving the gas sensitivity and electrical conductivity and the effect of the amount of additives in the sensing material on the electrical conductivity was investigated. The effect of the amount of frit glass in the termination on the sensor performance, especially mechanical integrity, was considered and the crack initiation and propagation in the boundary between the sensing material and the termination was studied.

Keywords