Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.432-433
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- 2005
Characteristics of AZO(ZnO:Al) thin film with the substrate temperature and post-annealing
기판온도 및 후 열처리에 따른 AZO(ZnO:Al) 박막의 특징
- Kim, Kyung-Hwan (Kyungwon University) ;
- Cho, Bum-Jin (Kyungwon University) ;
- Keum, Min-Jong (Kyungwon University) ;
- Son, In-Hwan (Shinsung college) ;
- Choi, Hyung-Wook (Kyungwon University) ;
- Choi, Myung-Kyu (Kyungwon college)
- Published : 2005.07.07
Abstract
In this study, Al doped ZnO(AZO) thin film were prepared on glass substrates by FTS(Facing Targets Sputtering) system. We investigated electrical, optical and structural properties of AZO thin film with the substrate temperature of the R.T,