Xe Plasma property with flat lamp by Langmuir probe

정전탐침법을 사용한 평판형 광원의 제논(Xe)플라즈마 특성 연구

Discharge of the flat lamp lighting source research are requested very much. For improving brightness. life time. efficiency of flat lamp and plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important. When a distance of discharge electrode is 5.5mm and width is 16.5mm. we measured electron temperature and electron density measured with single Langmuir probe in flat lamp. We tested the discharge from 100 Torr to 300 Torr pressure. The pulse type was rectangular with frequency 20kHz and duty ratio was 20%. In result. electron temperature decreases and electron density increased as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.