Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.05b
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- Pages.10-14
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- 2005
The Preparation of ZnO Piezo-electric Thin Film for Surface Acoustic Wave Filter
탄성표면파 필터용 ZnO 압전 박막의 제조
- Lee, Dong-Yoon (Joongbu Univ.) ;
- Park, Jae-Jun (Joongbu Univ.)
- Published : 2005.05.27
Abstract
Zinc Oxide(ZnO) thin films on Si (100) substrates were deposited by RF magnetron reactive sputtering. The characteristics of zinc oxide thin films with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance were investigated. To analyze a crystallographic properties of the films,