기판바이어스법을 이용한 다결정 실리콘 박막의 실온 제작

  • Chu, Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
  • Yang, Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
  • Lee, Jung-Hui (Division of Electronics and Information, Chonbuk National University) ;
  • Choi, Byoung-Jung (Division of Electronics and Information, Chonbuk National University) ;
  • Yatsui, Kiyoshi (Extreme Energy-Density Research Institute, Nagaoka University of Technology)
  • 발행 : 2005.02.15