Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Comparison of Cobalt thin films deposited by using two Co precursor In terms of conformality and properties

  • 이정길 (국민대학교 신소재공학부) ;
  • 이재갑 (국민대학교 신소재공학부)
  • Published : 2005.02.15
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