Fabrication of nanohoneycomb structures and measurement of pore sizes

나노허니컴 구조물의 제작 및 홀 사이즈 측정

A new method for measurement of the pore size in a nanohoneycomb structure using atomic force microscopy (AFM) was proposed. Porous type anodic aluminum oxide (AAO) was fabricated as a nanohoneycomb structure to measure the pore size. For measuring pore sizes from AFM images, a criterion was set in porous type AAO. The pore sizes from AFM images were compared with those from SEM images, and the results showed good agreement. The relationship between the pore size and widening time was found to be linear in the range of this study. It was understood as the synchronized effects of the impurity gradient in outer oxide of AAO, mechanical packing and mass transfer increase.