The low temperature process design for Al doped ZnO film synthesis on polymer

폴리머 기판상에 Al이 도핑된 ZnO 박막을 합성하기 위한 저온 공정 개발

  • Moon, Chang-S. (Advanced Materials Engineering, Sungkyunkwan University) ;
  • Chung, Yun-M. (Advanced Materials Engineering, Sungkyunkwan University) ;
  • Jung, Woo-S. (Advanced Materials Engineering, Sungkyunkwan University) ;
  • Han, Jeon-G. (Advanced Materials Engineering, Sungkyunkwan University)
  • Published : 2005.11.04