Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2005.05a
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- Pages.142-142
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- 2005
The low temperature synthesis of Al doped ZnO films on glass & polymer using magnetron co-sputtering : working pressure and oxygen content effect
마그네트론 co-sputtering 법을 이용한 ZnO:Al 박막의 저온 합성
- Published : 2005.05.26
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