Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2005.05a
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- Pages.149-149
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- 2005
Influence of substrate temperature on the properties of Al doped ZnO(ZnO:Al) thin films deposited by direct current magnetron sputtering
DC 마그네트론 스퍼트링 법으로 증착한 ZnO:Al 박막의 기판온도 영향에 따른 특성 연구
- Koo, Hong-Mo (Division of Materials Science and Engineering, Hanyang University) ;
- Bang, Bo-Rae (Division of Materials Science and Engineering, Hanyang University) ;
- Moon, Yeon-Keon (Division of Materials Science and Engineering, Hanyang University) ;
- Kim, Se-Hyun (Division of Materials Science and Engineering, Hanyang University) ;
- Jeong, Chang-Oh (LCD R&D Center, Samsung Electronics Co., LTD.) ;
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Park, Jong-Wan
(Division of Materials Science and Engineering, Hanyang University)
- Published : 2005.05.26
Abstract
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