Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2005.05a
- /
- Pages.261-261
- /
- 2005
Interfacial multi-layer formation between a thin zirconate film and a silicon substrate during thermal treatment
열처리시 Si 기판과 zirconate 박막 사이에 형성되는 다층 구조 분석
- Heo, Jae-Seong ;
- Choe, Hun-Sang (RIKEN) ;
- Baek, Sang-Yeol ;
-
Son, Chang-Sik
;
- Choe, In-Hun
- Published : 2005.05.26
Abstract
Keywords