비정질 As-Ge-Se-S 박막에서 선택적 에칭을 통한 2차원 홀로그램 제작

2-dimensional hologram formation by selective etching on amorphous As-Ge-Se-S thin film

  • 김진홍 (광운대학교 전자정보공과대학 전자재료공학과) ;
  • 강진원 (광운대학교 전자정보공과대학 전자재료공학과) ;
  • 정홍배 (광운대학교 전자정보공과대학 전자재료공학과)
  • 발행 : 2006.07.12

초록

We investigated the formation of 2-dimension hologram grating by means of selective etching characteristic and photo-expansion effect according to photo irradiation on amorphous As-Ge-Se-S thin film. By method of phase holography, we made the 2-dimensional hologram grating by each (S:P) and ($+45^{\circ}:-45^{\circ}$) polarized beam with DPSS laser(532nm) and He-Ne laser(632nm). A recording property was observed at each polarized beam through 2-dimensional hologram surface relief grating. Chalcogenide thin film was etched selectively by NaOH solution after the formation of 1-dimensional diffraction grating. And then etched sample was rotated 90 degree to fabricate 2 dimensional hologram grating. We found that it was observed the formation of 2-dimensional hologram grating by AFM(Atomic Force Microscopy).

키워드