Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The influence of post-treatment using hydrogen ion bombardment on microstructures and field-emission properties of carbon nanotubes

수소 이온 충돌을 이용한 후처리가 탄소 나노튜브의 구조적 물성 및 전계방출 특성에 미치는 영향

  • Yun, Sung-Jun (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Park, Chang-Kyun (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
  • 윤성준 (한양대학교 전자전기제어계측공학과) ;
  • 박창균 (한양대학교 전자전기제어계측공학과) ;
  • 박진석 (한양대학교 전자전기제어계측공학과)
  • Published : 2006.07.12
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Abstract

Carbon nanotubes (CNTs) are grown on TiN-Coated silicon substrates at $700^{\circ}C$ using an ICP-CVD method. Ni catalysts for CNT growth are formed using an RF magnetron sputtering system. Post-treatment using hydrogen ions has been performed in the ICP reactor by varying the treatment period. The characterization using various techniques, such as FESEM, HRTEM, and Raman spectroscopy, show that the physical dimension as well as the crystal quality of CNTs are changed by the post-treatment process. It is also seen that the hydrogen ion-bombardment may change the surface structure of CNTs, which may lead to produce better electron emission properties. The physical reason for all the measured data obtained are discussed to establish the relationship between the structural property and the electron emission characteristic of CNTs.

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