대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

대기압형 단결정 실리콘 MEMS 각속도계의 설계, 제작 및 성능 측정

Design, Fabrication and Performance Test of A Non-Vacuum Packaged Single Crystalline Silicon MEMS Gyroscope

  • 정형균 (서울대학교, 전기.컴퓨터공학부) ;
  • 황영석 (서울대학교, 전기.컴퓨터공학부) ;
  • 성운탁 (마이크로인피니티) ;
  • 장현기 (인텔리마이크론즈) ;
  • 이장규 (서울대학교, 전기.컴퓨터공학부) ;
  • 김용권 (서울대학교, 전기.컴퓨터공학부)
  • Jung, Hyoung-Kyoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Hwang, Young-Seok (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Sung, Woon-Tahk (Microinfinity, Co., Ltd.) ;
  • Chang, Hyun-Kee (Intellimicrons, Co., Ltd.) ;
  • Lee, Jang-Gyu (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 발행 : 2006.07.12
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초록

In this paper, a non-vacuum packaged single crystalline silicon MEMS gyroscope is designed, fabricated and tested. To reduce air damping of the gyroscope structure for non-vacuum packaging, air damping model is used and damping is minimized by analysis. The inner and outer spring length is optimized by ANSYS simulation for rigid body motion. The gyroscope is fabricated by SiOG(Silicon On Glass) process. The performance of the gyroscope is measured to evaluate the characteristic of the gyroscope. The sensitivity, non-linearity, noise density and the bias stability are measured to 9.7693 mV/deg/s, 04265 %, 2.3 mdeg/s/rtHz and 16.1014 deg/s, respectively.

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