Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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Properties of high-k $TiO_2:SiO_2$ films grown by RF magnetron sputter

RF magnetron sputter로 성장시킨 고유전 $TiO_2:SiO_2$ 박막의 특성

  • Published : 2006.05.19
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