Proceedings of the Polymer Society of Korea Conference (한국고분자학회:학술대회논문집)
- 2006.10a
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- Pages.15-16
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- 2006
Lithographic Microfabrication for Nano/Micro-Objects by using Two-Photon Polymerization Technique
- Lee, Kwang-Sup (Department of Polymer Science and Engineering, Hannam University) ;
- Kang, Seung-Wan (Department of Polymer Science and Engineering, Hannam University) ;
- Kim, Ran-Hee (Department of Polymer Science and Engineering, Hannam University) ;
- Kim, Ju-Yeon (Department of Polymer Science and Engineering, Hannam University) ;
- Kim, Won-Jin (Department of Polymer Science and Engineering, Hannam University) ;
- Park, Sang-Hu (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
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Lim, Tae-Woo
(Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
;
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Yang, Dong-Yol
(Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
;
- Sun, Hong-Bo (Department of Applied Physics, Osaka University) ;
- Kawata, Satoshi (Department of Applied Physics, Osaka University)
- Published : 2006.10.13
Abstract
Since two-photon polymerization (TPP) emerged as a new technology over a decade ago, a large variety of micro-objects including 3-D micro-optical components, micromechanical devices, and 3-D photonic crystals have been fabricated using TPP with a high spatial resolution of approximately submicron scale to 100 nm. Recent efforts have been made to improve the fabrication efficiency and precision of micro-objects obtained with TPP; in particular, many studies have been carried out with the aim of developing efficient two-photon absorbing chromophores. In this presentation, we will discuss our efforts to develop highly efficient two-photon absorbing materials and also describe recent attempts to enhance the resolution and to improve the fabrication efficiency of nanofabrications based on TPP.
Keywords