Ultrasensitive metal-oxide gas sensors obtained using colloidal templates

  • Kim, Il-Doo (Optoelectronic Materials Research Center, Korea Institute of Science and Technology) ;
  • Rothschild Avner (Department of Materials Science and Engineering, Massachusetts Institute of Technnology) ;
  • Hyodo Takeo (Department of Materials Science and Engineering, Faculty of Engineering, Nagasaki University) ;
  • Tuller Harry L.. (Department of Materials Science and Engineering, Massachusetts Institute of Technnology)
  • Published : 2006.10.13

Abstract

Chemical and physical synthesis routes were combined to prepare macroporous thin films of semiconducting metal-oxides such as $CaCu_{3}Ti_{4}O_{12}\;and\;TiO_{2}$ by sputtering onto (PMMA) microsphere templated substrates. Subsequently, the colloidal templates were removed by thermal decomposition. The remaining inorganic films comprised a monolayer of hollow hemispheres with diameter commensurate with that of the microspheres. This unique morphology increases the surface area and reduces the interfacial area between film and substrate. Consequently, the surface activity is markedly enhanced while deleterious interfacial effects between film and substrate are significantly reduced. Both effects are highly advantageous for gas sensing applications.

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