Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.10a
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- Pages.669-670
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- 2006
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- 2005-8446(pISSN)
Numerical Simulation of Thermal Control of a Hot Plate for Hot Embossing Nano-Imprinting Equipments Using a CFD Code
CFD 코드를 이용한 고온 엠보싱 나노식각 장비용 열판의 열제어 및 거동 모사
- Park, G.J. (Dept. of Mech. Eng., Kumoh Natio'. Insti'. of Tech.) ;
- Kwak, H.S. (Div. of Mech. Eng. Kumoh Natio'. Insti'. of Tech.) ;
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Shin, D.W.
(Div. of Mech. Eng. Kumoh Natio'. Insti'. of Tech.)
;
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Lee, J.J.
(KIMM)
- Published : 2006.10.18