High Resolution Electrodes Fabrication for OTFT Array by using Microcontact Printing and Room Temperature Process

  • Jo, Jeong-Dai (Intelligent & Precision Machinery Research Division, Korea Institute of Machinery & Materials (KIMM)) ;
  • Choi, Ju-Hyuk (Intelligent & Precision Machinery Research Division, Korea Institute of Machinery & Materials (KIMM)) ;
  • Kim, Kwang-Young (Intelligent & Precision Machinery Research Division, Korea Institute of Machinery & Materials (KIMM)) ;
  • Lee, Eung-Sug (Intelligent & Precision Machinery Research Division, Korea Institute of Machinery & Materials (KIMM)) ;
  • Esashi, Masayoshi (Intelligent & Precision Machinery Research Division, Korea Institute of Machinery & Materials (KIMM))
  • Published : 2006.08.22

Abstract

The flexible organic thin film transistor (OTFT) array to use as a switching device for an organic light emitting diode (OLED) was designed and fabricated in the microcontact printing and room temperature process. The gate, source, and drain electrode patterns of OTFT were fabricated by microcontact printing process. The OTFT array with dielectric layer and organic active semiconductor layer formed at room temperature or at a temperature lower than $40^{\circ}C$. The microcontact printing process using SAM and PDMS stamp made it possible to fabricate OTFT arrays with channel lengths down to even submicron size, and reduced the fabrication process by 10 steps compared with photolithography. Since the process was done in room temperature, there was no pattern shrinkage, transformation, and bending problem appeared. Also, it was possible to improve electric field mobility, to decrease contact resistance, to increase close packing of molecules by SAM, and to reduce threshold voltage by using a big dielectric.

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