한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Selective Growth of Carbon Nanotubes and Its Electron Emission Properties

  • Ryu, Je-Hwang (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Kim, Ki-Seo (Dept. of Physics and Advanced Display Research Center, Kyung Hee University) ;
  • Yu, Yi-Yin (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Moon, Jong-Hyun (Advanced Display Research Center, Kyung Hee University) ;
  • Park, Kyu-Chang (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University) ;
  • Jang, Jin (Dept. of Information Display and Advanced Display Research Center, Kyung Hee University)
  • Published : 2006.08.22
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Abstract

We have grown well-aligned carbon nanotube arrays on the selective areas by plasma enhanced chemical vapor deposition at the substrate temperature of $580\;^{\circ}C$. The selective areas for CNTs growth can be defined by photo lithography technology. The CNTs are uniformly grown on the areas regardless of island diameters. Electron emission currents were measured in a vacuum with a diode structure at room temperature. Uniform electron emission currents were achieved with $40\;{\mu}m$ island spacing with $5{\mu}m$ island diameter.

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