한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.1334-1338
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- 2006
Indium Tin Oxide (ITO) Thin Film Fabricated by Indium-Tin-Organic sol with ITO Nanoparticle at Low Temperture
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Hong, Sung-Jei
(Information Display Research Center, Korea Electronics Technology Institute)
;
- Chang, Sang-Gweon (Epixon Co., Ltd.) ;
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Han, Jeong-In
(Information Display Research Center, Korea Electronics Technology Institute)
- Published : 2006.08.22
Abstract
In this work, indium tin oxide (ITO) thin film was fabricated by indium-tin-organic sol including ITO nanoparticle. ITO nanoparticle showed ultrafine size about 5 nm and (222) preferred crystal structure. Also, ITO sol-gel thin film showed good optical transmittance over 83% and electrical resistance less than
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