한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Reduction of reflection from PET (polyethylene terephthalate) film surface by natural plasma etching

  • Oh, Hoon (Plasma Laboratory, School of Electrical Engineering Seoul National University) ;
  • Song, Yu-Jin (Plasma Laboratory, School of Electrical Engineering Seoul National University) ;
  • Whang, Ki-Woong (Plasma Laboratory, School of Electrical Engineering Seoul National University)
  • Published : 2006.08.22
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Abstract

We could reduce the reflection from PET(polyethylene terephthalate) film surface by natural plasma etching which does not use etch masks. The plasma etched PET film showed lower reflectance and higher transmittance which is resulted by making subwavelength structure(SWS) on the film surface by the plasma etch rate difference between the amorphous and crystalline region in the surface of PET film.

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