한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.1465-1468
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- 2006
MURA Detection Method using a Slit-Beam-Profile Ellipsometer
- Murai, Hideyuki (IA Advanced Technology Dept., OMRON Corporation) ;
- Ekawa, Koichi (IA Advanced Technology Dept., OMRON Corporation) ;
- Takashima, Jun (IA Advanced Technology Dept., OMRON Corporation) ;
- Naito, Hitoshi (IA Advanced Technology Dept., OMRON Corporation) ;
- Nakatsuka, Nobuo (IA Advanced Technology Dept., OMRON Corporation)
- Published : 2006.08.22
Abstract
We developed a new ellipsometer for MURA detection. This ellipsometer can measure MURA along the slit line on the sample with high sensitivity, because this ellipsometer irradiates a slit beam onto the sample but can reject the reflected light from the back surface of the substrate. This ellipsometer is suitable for measuring MURA of the surface of sample with high sensitivity.
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