한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.1510-1515
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- 2006
Aqueous-Base-Developable Benzocyclobutene (BCB)-Based Material for Display Applications
- So, Ying-Hung (The Dow Chemical Company, Advanced Electronic Materials) ;
- Stark, Edmund (The Dow Chemical Company, Advanced Electronic Materials) ;
- Li, Yongfu (The Dow Chemical Company, Advanced Electronic Materials) ;
- Achen, Albert (Dow Europe, Rheinmunster) ;
- Scheck, Dan (The Dow Chemical Company, Research Triangle Park) ;
- Kisting, Scott (The Dow Chemical Company, Advanced Electronic Materials) ;
- Baranek, Kayla (The Dow Chemical Company, Advanced Electronic Materials) ;
- Wood, Charilie (The Dow Chemical Company, Analytical Sciences Laboratory)
- Published : 2006.08.22
Abstract
A self-priming and photosensitive aqueous-basedevelopable benzocyclobutene (BCB)-based dielectric material curable in air is described. Patterned films have high resolution. Whether cured in nitrogen or in air, the formulation produces a film with optical, electrical, thermal, and mechanical properties desired for many microelectronic applications, such as a planarization layer or insulation layer in display applications. A self-priming, air-curable nonphoto- sensitive BCB material is also described.
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