Roll-to-Roll Fabrication of Active-Matrix Backplanes Using Self-Aligned Imprint Lithography (SAIL)

  • Published : 2006.08.22

Abstract

We have developed self-aligned imprint lithography (SAIL) technology, an innovative method for roll-to-roll (R2R) fabrication of electronic devices on flexible plastic substrates. In this paper, we present the first R2R-produced ${\alpha}$-Si TFTs built on a polyimide substrate using the SAIL process, and prove the feasibility of this technology to enable R2R fabrication of flexible display active matrix (AM) backplanes with high precision and throughput.

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