한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.1673-1675
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- 2006
Challenges for large size TV manufacturing;Process and Test Equipment
- Kang, In-Doo (AKT, Technical Marketing) ;
- Brunner, Mathias (AKT, Technical Marketing) ;
- Tanaka, Tak (AKT, Technical Marketing) ;
- Sun, Sheng (AKT, Technical Marketing) ;
- Li, Julia (AKT, Technical Marketing)
- Published : 2006.08.22
Abstract
As the manufacturing capacity needs for large size LCD TV shifts very fast into next generation, processing and test equipment makers face more difficult challenges in accommodating productivity, reliability and lead time of panel makers as well as the prerequisite of high process quality. In this paper, AKT will discuss its new innovative productivity solutions in PECVD (Plasma Enhanced Chemical Vapor Deposition), as the key thin film process system, and EBT (Electron Beam Test), as the key array test system, for the huge glass size with surface dimension larger than 2 meter by 2 meter.
Keywords