Development of nanocrystalline silicon thin film transistors with low-leakage and high stability for AMOLED displays

  • Published : 2006.08.22

Abstract

Nanocrystalline silicon (nc-Si) based TFTs were developed using a conventional PECVD production system. Devices exhibit very interesting characteristics, in particular when using a bi-layer structure which reduces leakage current and improves subthreshold area. Good stability and low leakage current make these devices suitable for the fabrication of low-cost and high performance AMOLED displays.

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