Statistical modeling of pretilt angle control for NLC using ion beam alignment

이온빔 배향을 이용한 네마틱 액정의 프리틸트각 제어를 위한 통계적 모델링

  • Published : 2006.11.09

Abstract

The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. The response surface model is used to analyze the variation of the pretilt angle under various process conditions IB exposure angle and IB exposure time are considered as Input factors. The analysis of variance technique is used to analyze the statistical significance, and effect plots are also investigated to examine the relationships betweenthe process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

Keywords