한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
- /
- Pages.305-306
- /
- 2006
Sol-gel법에 의한 ZnO:Ga, Al 박막의 투명 전도막 제작과 전기 광학적 특성
Electrical and optical properties of ZnO:Ga, Al thin films prepared by sol-gel method
- Nam, Gil-Mo (Department of Materials Science and Engineering, University of Seoul) ;
- Kwon, Myoung-Seok (Department of Materials Science and Engineering, University of Seoul)
- 발행 : 2006.11.09
초록
Ga-doped and Al-doped ZnO thin films were fabricated via a sol-gel technique and electrical and optical properties of the films were investigated. Film deposition was performed by spin coating at 4000 rpm for 30 s on