Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization of Exposed interdigitated Capacitor in Low Temperature Co-fired Ceramic

저온 동시 소성세라믹으로 제작된 노출형 교차전극형 캐패시터의 특성 연구

  • Ahn, Min-Su (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
  • Kang, Jung-Han (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
  • Yun, Il-Gu (Dept. of Electrical and Electronic Engineering, Yonsei University)
  • 안민수 (연세대학교대학교 전기전자공학과) ;
  • 강정한 (연세대학교대학교 전기전자공학과) ;
  • 윤일구 (연세대학교대학교 전기전자공학과)
  • Published : 2006.06.22
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Abstract

In this paper, we describe a method of accurate modeling capacitor in Low Temperature Co-fired Ceramic(LTCC). We obtain building blocks that present characterization of test structure through partial element equivalent circuit (PEEC) method. The extracted model of building blocks can be used for predicting behaviors of capacitors with different geometries. This method can provide the good inspection of capacitor to device engineer.

Keywords