Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Motion of Carbon Plume in Ar Plasmas

Ar 플라즈마 상태에서의 탄소 입자 운동 모델링

  • So, Soon-Youl (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Chung, Hae-Deok (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Lee, Jin (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Park, Gye-Choon (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Kim, Chang-Sun (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Moon, Chae-Joo (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University)
  • 소순열 (목포대학교 전기제어신소재공학부) ;
  • 정해덕 (목포대학교 전기제어신소재공학부) ;
  • 이진 (목포대학교 전기제어신소재공학부) ;
  • 박계춘 (목포대학교 전기제어신소재공학부) ;
  • 김창선 (목포대학교 전기제어신소재공학부) ;
  • 문채주 (목포대학교 전기제어신소재공학부)
  • Published : 2006.05.19
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Abstract

A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films, because it can generate highly energetic carbon clusters on a substrate. This paper was focused on the understanding and analysis of the motion of C particles in laser ablation assisted by Ar plasmas. The simulation has carried out under the pressure P=50 mTorr of Ar plasmas. Two-dimensional hybrid model consisting of fluid and Monte-Carlo models was developed and three kinds of the ablated particles which are carbon atom (C), ion ($C^+$) and electron were considered in the calculation of particle method. The motions of energetic $C^+$ and C deposited upon the substrate were investigated and compared. The interactions between the ablated particles and Ar gas plasmas were discussed.

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