한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

레이져 용삭법에 의한 탄소입자 운동모델 - 플라즈마와의 상관관계 -

The Carbon Plume Simulation by Pulsed Laser Ablation Method - Interactions between Ar plasmas and Carbon Plume -

  • 소순열 (목포대학교 전기제어신소재공학부) ;
  • 정해덕 (목포대학교 전기제어신소재공학부) ;
  • 이진 (목포대학교 전기제어신소재공학부) ;
  • 민용기 (목포대학교 전기제어신소재공학부) ;
  • 박계춘 (목포대학교 전기제어신소재공학부) ;
  • 김창선 (목포대학교 전기제어신소재공학부) ;
  • 문채주 (목포대학교 전기제어신소재공학부)
  • So, Soon-Youl (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Chung, Hae-Deok (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Lee, Jin (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Park, Gye-Choon (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Park, Gye-Chun (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Kim, Chang-Sun (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Moon, Chae-Joo (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University)
  • 발행 : 2006.12.01
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초록

A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films. This paper was focused on the understanding and analysis of the motion of carbon atom (C) and carbon ion ($C^+$) particles in laser ablation assisted by Ar plasmas. The simulation has carried out under the pressure P=10~100 mTorr of Ar plasmas. Two-dimensional hybrid model consisting of fluid and Monte-Carlo models was developed and three kinds of the ablated particles which are C, $C^+$ and electron were considered in the calculation of particle method. The motions of energetic $C^+$ and C deposited upon the substrate were investigated and compared.

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