레이저 다이오드 Mirror면의 Anti-Reflection 코팅 박막 제작 및 특성 분석

The Manufacture and Properties Analysis of Anti-Reflection Coating Thin Film of Laser Diode Mirror

  • 발행 : 2006.12.01

초록

Semiconductor laser diode has a reflective facet in a both-ends side fundamentally. Laser performance for improving, Anti-Reflection and High-reflection coating on the facet of semiconductor laser diode. To prevent internal feedback from both facets for realizing superluminescent diode and reducing the reflection-induced intensity noise of laser diode, it's key techniques are AR/HR coatings. In the study AR coating film were manufactured by Ion-Assisted Deposition(IAD) system. Then manufactured coating film measurement electrical properties(L-I-V, Se, Resistor) and Optical properties (wavelength FFP)

키워드